Inventor · disambiguated record
Reinier Theodorus Martinus Jilisen
Also filed as: JILISEN REINIER THEODORUS MARTINUS
8 granted patents·1 pending application·9 citations·filing 2013–2023
77Inventor score
Top patents by PatentIndex Score
9 records- 0174US10379443B2Radiation source device, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Aug 13, 2019·5 cites·18 claims
- 0265US9753383B2Radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·2 cites·14 claims
- 0362US10394141B2Radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 27, 2019·1 cites·20 claims
- 0457US12158705B2End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatusesASML HOLDING NV·Filed 2021·Granted Dec 3, 2024·0 cites·20 claims
- 0553US10588211B2Radiation source having debris controlASML NETHERLANDS BV·Filed 2014·Granted Mar 10, 2020·1 cites·20 claims
- 0652US11703768B2Lithographic apparatus and related methodsASML NETHERLANDS BV·Filed 2020·Granted Jul 18, 2023·0 cites·16 claims
- 0752US2025349526A1Fluid dispensing system and methodASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0849US12326428B2Residual gas analyzerASML NETHERLANDS BV·Filed 2021·Granted Jun 10, 2025·0 cites·17 claims
- 0948US10095119B2Radiation source and method for lithographyASML NETHERLANDS BV·Filed 2013·Granted Oct 9, 2018·0 cites·26 claims
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