Inventor · disambiguated record
Wilbert Jan Mestrom
Also filed as: MESTROM WILBERT JAN
7 granted patents·1 pending application·16 citations·filing 2010–2017
77Inventor score
Files withASML NETHERLANDS BV4MESTROM WILBERT JAN2KEMPEN ANTONIUS THEODORUS WILHELMUS1LOOPSTRA ERIK ROELOF1
Top patents by PatentIndex Score
8 records- 0191US8598551B2EUV radiation source comprising a droplet accelerator and lithographic apparatusMESTROM WILBERT JAN·Filed 2010·Granted Dec 3, 2013·11 cites·15 claims
- 0265US9753383B2Radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Sep 5, 2017·2 cites·14 claims
- 0365US9164403B2Radiation source, lithographic apparatus and device manufacturing methodKEMPEN ANTONIUS THEODORUS WILHELMUS·Filed 2010·Granted Oct 20, 2015·1 cites·16 claims
- 0462US10394141B2Radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2017·Granted Aug 27, 2019·1 cites·20 claims
- 0552US9510432B2Radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2013·Granted Nov 29, 2016·0 cites·20 claims
- 0652US9007560B2Radiation sourceMESTROM WILBERT JAN·Filed 2012·Granted Apr 14, 2015·1 cites·13 claims
- 0743US9648714B2Fuel system for lithographic apparatus, EUV source, lithographic apparatus and fuel filtering methodASML NETHERLANDS BV·Filed 2013·Granted May 9, 2017·0 cites·18 claims
- 0835US2012280148A1Euv radiation source and lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2010·Application pending·0 cites
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