Inventor · disambiguated record
Mitsuaki Amemiya
Also filed as: AMEMIYA MITSUAKI
43 granted patents·4 pending applications·830 citations·filing 1985–2023
98Inventor score
Top patents by PatentIndex Score
47 records- 0191US5231291AWafer table and exposure apparatus with the sameCANON KK·Filed 1992·Granted Jul 27, 1993·149 cites·16 claims
- 0286US6647086B2X-ray exposure apparatusCANON KK·Filed 2001·Granted Nov 11, 2003·39 cites·28 claims
- 0386US5157700AExposure apparatus for controlling intensity of exposure radiationCANON KK·Filed 1989·Granted Oct 20, 1992·41 cites·47 claims
- 0483US7312459B2Apparatus for evaluating EUV light source, and evaluation method using the sameCANON KK·Filed 2005·Granted Dec 25, 2007·12 cites·9 claims
- 0583US5138643AExposure apparatusCANON KK·Filed 1990·Granted Aug 11, 1992·42 cites·9 claims
- 0682US5524131AAlignment apparatus and SOR x-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Jun 4, 1996·46 cites·20 claims
- 0778US4906326AMask repair systemCANON KK·Filed 1989·Granted Mar 6, 1990·40 cites·10 claims
- 0877US5822389AAlignment apparatus and SOR X-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Oct 13, 1998·36 cites·5 claims
- 0977US5329126AApparatus and process for vacuum-holding an objectCANON KABUHIKI KAISHA·Filed 1993·Granted Jul 12, 1994·30 cites·26 claims
- 1076US7465936B2Measuring method, exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Dec 16, 2008·4 cites·6 claims
- 1176US5093579AExposure apparatus with a substrate holding mechanismCANON KK·Filed 1990·Granted Mar 3, 1992·61 cites·16 claims
- 1273US5835560AExposure apparatusCANON KK·Filed 1997·Granted Nov 10, 1998·33 cites·12 claims
- 1372US5440394ALength-measuring device and exposure apparatusCANON KK·Filed 1994·Granted Aug 8, 1995·25 cites·17 claims
- 1471US5159621AX-ray transmitting window and method of mounting the sameCANON KK·Filed 1991·Granted Oct 27, 1992·22 cites·10 claims
- 1570US6455203B1Mask structure and method of manufacturing the sameCANON KK·Filed 2000·Granted Sep 24, 2002·10 cites·14 claims
- 1669US9036789B2X-ray apparatus and its adjusting methodCANON KK·Filed 2013·Granted May 19, 2015·3 cites·7 claims
- 1768US5323440AX-ray lithography apparatus including a dose detectable maskCANON KK·Filed 1993·Granted Jun 21, 1994·21 cites·15 claims
- 1868US5131022AExposure method and apparatusCANON KK·Filed 1991·Granted Jul 14, 1992·20 cites·14 claims
- 1967US6331709B1Alignment mark detection method, and alignment method, exposure method and device, and device production method making use of the alignment mark detection methodCANON KK·Filed 1996·Granted Dec 18, 2001·17 cites·27 claims
- 2065US5172403AX-ray exposure apparatusCANON KK·Filed 1990·Granted Dec 15, 1992·19 cites·14 claims
- 2163US6453001B2X-ray exposure apparatusCANON KK·Filed 2001·Granted Sep 17, 2002·6 cites·25 claims
- 2263US5606586AX-ray exposure method and apparatus and device manufacturing methodCANON KK·Filed 1996·Granted Feb 25, 1997·21 cites·11 claims
- 2361US5267292AX-ray exposure apparatusCANON KK·Filed 1993·Granted Nov 30, 1993·16 cites·15 claims
- 2458US5604779AOptical exposure method and device formed by the methodCANON KK·Filed 1995·Granted Feb 18, 1997·17 cites·14 claims
- 2558US5444758ABeam position detecting deviceCANON KK·Filed 1994·Granted Aug 22, 1995·17 cites·9 claims
- 2656US5581590ASOR exposure system and method of manufacturing semiconductor devices using sameCANON KK·Filed 1994·Granted Dec 3, 1996·13 cites·6 claims
- 2755US7633598B2Filter exposure apparatus, and device manufacturing methodCANON KK·Filed 2006·Granted Dec 15, 2009·1 cites·12 claims
- 2854US7014707B2Apparatus and process for producing crystal article, and thermocouple used thereinCANON KK·Filed 2000·Granted Mar 21, 2006·5 cites·15 claims
- 2953US6647087B2Exposure methodCANON KK·Filed 2001·Granted Nov 11, 2003·3 cites·40 claims
- 3050US11112511B2Radiation detector and compton cameraCANON KK·Filed 2019·Granted Sep 7, 2021·0 cites·11 claims
- 3150US2024201294A1Information processing apparatus, magnetic resonance imaging apparatus, information processing method, and storage mediumCANON KK·Filed 2023·Application pending·0 cites
- 3249US6272202B1Exposure method and X-ray mask structure for use with the sameCANON KK·Filed 1999·Granted Aug 7, 2001·14 cites·17 claims
- 3349US5400386AAngle detecting device and optical apparatus, such as exposure apparatus, employing the sameCANON KK·Filed 1994·Granted Mar 21, 1995·9 cites·36 claims
- 3448US6642528B2Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection methodCANON KK·Filed 2001·Granted Nov 4, 2003·1 cites·14 claims
- 3547US6645707B2Device manufacturing methodCANON KK·Filed 2000·Granted Nov 11, 2003·1 cites·11 claims
- 3646US9020102B2X-ray optical apparatusCANON KK·Filed 2013·Granted Apr 28, 2015·0 cites·6 claims
- 3746US5680428AProcess for holding an objectCANON KK·Filed 1995·Granted Oct 21, 1997·9 cites·10 claims
- 3846US4604345AExposure methodCANON KK·Filed 1985·Granted Aug 5, 1986·7 cites·11 claims
- 3945US9020104B2X-ray optical apparatus and adjusting method thereofCANON KK·Filed 2013·Granted Apr 28, 2015·0 cites·12 claims
- 4045US7271875B2Alignment apparatus, exposure apparatus and device fabrication methodCANON KK·Filed 2005·Granted Sep 18, 2007·0 cites·12 claims
- 4145US4935947AX-ray exposure apparatusCANON KK·Filed 1989·Granted Jun 19, 1990·8 cites·14 claims
- 4244US9020098B2Radiation imaging apparatusCANON KK·Filed 2013·Granted Apr 28, 2015·0 cites·8 claims
- 4342US6324250B1Exposure methodCANON KK·Filed 1999·Granted Nov 27, 2001·9 cites·34 claims
- 4440US2005270509A1Measuring apparatus, exposure apparatus having the same, and device manufacturing methodOGUSHI NOBUAKI·Filed 2005·Application pending·0 cites
- 4538US2016341833A1Radiation detection apparatusCANON KK·Filed 2016·Application pending·0 cites
- 4635US2015318139A1Target device, lithography apparatus, and article manufacturing methodCANON KK·Filed 2015·Application pending·0 cites
- 4734US6327332B1Exposure methodCANON KK·Filed 1999·Granted Dec 4, 2001·3 cites·40 claims
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