Inventor · disambiguated record
Yumiko Ohsaki
Also filed as: OHSAKI YUMIKO
14 granted patents·171 citations·filing 1998–2009
92Inventor score
Top patents by PatentIndex Score
14 records- 0196US7508493B2Exposure apparatus and device manufacturing methodCANON KK·Filed 2007·Granted Mar 24, 2009·30 cites·10 claims
- 0291US6351304B1Multiple exposure methodCANON KK·Filed 2000·Granted Feb 26, 2002·42 cites·36 claims
- 0385US7675629B2Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics using the interference patternCANON KK·Filed 2007·Granted Mar 9, 2010·14 cites·17 claims
- 0478US7956987B2Measurement apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2008·Granted Jun 7, 2011·5 cites·9 claims
- 0577US7538854B2Measuring apparatus and exposure apparatus having the sameCANON KK·Filed 2006·Granted May 26, 2009·7 cites·9 claims
- 0676US7466395B2Exposure apparatus and device manufacturing method using the apparatusCANON KK·Filed 2006·Granted Dec 16, 2008·4 cites·10 claims
- 0776US6586168B1Exposure method based on multiple exposure processCANON KK·Filed 2000·Granted Jul 1, 2003·13 cites·22 claims
- 0873US6842255B2Interferometer and interferance measurement methodCANON KK·Filed 2002·Granted Jan 11, 2005·17 cites·13 claims
- 0967US6620556B2Mask for multiple exposureCANON KK·Filed 2000·Granted Sep 16, 2003·9 cites·16 claims
- 1060US7688424B2Measurement apparatus, exposure apparatus, and device fabrication methodCANON KK·Filed 2008·Granted Mar 30, 2010·1 cites·11 claims
- 1159US6975385B2Projection optical system and exposure apparatusCANON KK·Filed 2003·Granted Dec 13, 2005·6 cites·13 claims
- 1258US7158144B2Image processing apparatus and method for converting data dependent on a first illuminating light into data dependent on a second illuminating lightCANON KK·Filed 1998·Granted Jan 2, 2007·22 cites·9 claims
- 1347US6709794B2Exposure method based on multiple exposure processCANON KK·Filed 2003·Granted Mar 23, 2004·1 cites·5 claims
- 1445US8223315B2Measuring apparatus and exposure apparatus having the sameOHSAKI YUMIKO·Filed 2009·Granted Jul 17, 2012·0 cites·4 claims
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