Inventor · disambiguated record
Yahong Yao
Also filed as: YAO YAHONG
12 granted patents·131 citations·filing 2001–2021
91Inventor score
Top patents by PatentIndex Score
12 records- 0192US7752910B2Micromachined mass flow sensor and methods of making the sameSIARGO INC·Filed 2008·Granted Jul 13, 2010·13 cites·19 claims
- 0291US7780343B2Micromachined gas and liquid concentration sensor and method of making the sameSIARGO LTD·Filed 2007·Granted Aug 24, 2010·20 cites·15 claims
- 0389US7536908B2Micromachined thermal mass flow sensors and insertion type flow meters and manufacture methodsSIARGO LTD·Filed 2005·Granted May 26, 2009·21 cites·34 claims
- 0486US7878056B2Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the sameSIARGO LTD·Filed 2007·Granted Feb 1, 2011·17 cites·9 claims
- 0585US7908096B2Integrated micromachined thermal mass flow sensor and methods of making the sameSIARGO LTD·Filed 2007·Granted Mar 15, 2011·16 cites·11 claims
- 0681US8794082B2MEMS time-of-flight thermal mass flow meterHUANG LIJI·Filed 2011·Granted Aug 5, 2014·6 cites·8 claims
- 0778US7765679B2Method of manufacturing a flow rate sensorSIARGO INC·Filed 2006·Granted Aug 3, 2010·13 cites·17 claims
- 0872US6620712B2Defined sacrifical region via ion implantation for micro-opto-electro-mechanical system (MOEMS) applicationsINTPAX INC·Filed 2001·Granted Sep 16, 2003·18 cites·26 claims
- 0962US8132455B2Robust micromachined thermal mass flow sensor with double side passivated polyimide membraneCHEN CHIH-CHANG·Filed 2009·Granted Mar 13, 2012·4 cites·6 claims
- 1060US11927555B2Micromachined thermal time-of-flight fluidic concentration metering deviceHUANG LIJI·Filed 2021·Granted Mar 12, 2024·0 cites·12 claims
- 1151US6781735B2Fabry-Perot cavity manufactured with bulk micro-machining process applied on supporting substrateFiled 2002·Granted Aug 24, 2004·3 cites·23 claims
- 1247US10908006B2Method for forming micromachined liquid flow sensorCHEN CHIH CHANG·Filed 2019·Granted Feb 2, 2021·0 cites·10 claims
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