Inventor · disambiguated record
Matus Kalisky
Also filed as: KALISKY MATUS
4 granted patents·1 pending application·3 citations·filing 2018–2023
61Inventor score
Files withZEISS CARL SMT GMBH5
Top patents by PatentIndex Score
5 records- 0174US11054305B2Method and device for beam analysisZEISS CARL SMT GMBH·Filed 2019·Granted Jul 6, 2021·1 cites·22 claims
- 0270US10331048B2Mirror, in particular for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Jun 25, 2019·1 cites·20 claims
- 0369US10605654B2Method and device for beam analysisZEISS CARL SMT GMBH·Filed 2018·Granted Mar 31, 2020·1 cites·17 claims
- 0462US2024069453A1Heating arrangement and method for heating an optical elementZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0545US10520827B2Optical system, in particular for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2019·Granted Dec 31, 2019·0 cites·21 claims
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