Inventor · disambiguated record
Feng-Yuan Chiu
Also filed as: CHIU FENG-YUAN
7 granted patents·82 citations·filing 2008–2017
80Inventor score
Top patents by PatentIndex Score
7 records- 0192US9367655B2Topography-aware lithography pattern checkSHIH I-CHANG·Filed 2012·Granted Jun 14, 2016·69 cites·20 claims
- 0283US8952329B13D image profiling techniques for lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Feb 10, 2015·6 cites·19 claims
- 0379US8910092B1Model based simulation method with fast bias contour for lithography process checkTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Dec 9, 2014·6 cites·18 claims
- 0465US9612526B2Photomask and method for fabricating integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Apr 4, 2017·1 cites·20 claims
- 0557US9983473B2Photomask and method for fabricating integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 29, 2018·0 cites·20 claims
- 0648US9159577B2Method of forming substrate patternTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Oct 13, 2015·0 cites·20 claims
- 0741US8103978B2Method for establishing scattering bar ruleLIN CHUN-YU·Filed 2008·Granted Jan 24, 2012·0 cites·8 claims
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