Inventor · disambiguated record
Ming-Hui Lu
Also filed as: Lu ming-hui
9 granted patents·3 pending applications·23 citations·filing 2008–2019
82Inventor score
Top patents by PatentIndex Score
12 records- 0177US9039925B2Polishing slurry compositionCHEN WEI-JUNG·Filed 2012·Granted May 26, 2015·6 cites·24 claims
- 0275US8641920B2Polishing composition for planarizing metal layerCHANG SONG-YUAN·Filed 2009·Granted Feb 4, 2014·6 cites·13 claims
- 0374US9165760B2Cleaning composition and cleaning method using the sameUWIZ TECHNOLOGY CO LTD·Filed 2013·Granted Oct 20, 2015·4 cites·13 claims
- 0474US7763577B1Acidic post-CMP cleaning compositionUWIZ TECHNOLOGY CO LTD·Filed 2009·Granted Jul 27, 2010·5 cites·10 claims
- 0564US8901001B2Slurry composition and method of fabricating damascene structure using the sameCHANG SONG-YUAN·Filed 2009·Granted Dec 2, 2014·2 cites·23 claims
- 0644US10501660B2Method of selectively removing tungsten over silicon oxideUWIZ TECH CO LTD·Filed 2019·Granted Dec 10, 2019·0 cites·8 claims
- 0744US9718991B2Chemical mechanical polishing slurryUWIZ TECH CO LTD·Filed 2015·Granted Aug 1, 2017·0 cites·8 claims
- 0844US2010193728A1Chemical Mechanical Polishing CompositionCHANG SONG-YUAN·Filed 2008·Application pending·0 cites
- 0942US8747693B2Silica having metal ions absorbed thereon and fabricating method thereofHO YUN-LUNG·Filed 2012·Granted Jun 10, 2014·0 cites·20 claims
- 1039US2011160112A1Cleaning compositionUWIZ TECHNOLOGY CO LTD·Filed 2010·Application pending·0 cites
- 1134US9493678B2Polishing compositionUWIZ TECH CO LTD·Filed 2015·Granted Nov 15, 2016·0 cites·9 claims
- 1231US2017253766A1Slurry composition, use thereof, and polishing methodUWIZ TECH CO LTD·Filed 2016·Application pending·0 cites
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