Inventor · disambiguated record
Gert-Jan Heerens
Also filed as: HEERENS GERT-JAN
17 granted patents·6 pending applications·112 citations·filing 2003–2016
93Inventor score
Files withASML NETHERLANDS BV20HEERENS GERT-JAN1NEDERLANDSE ORGANISATIE VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO1VOLKER ARNO WILLEM FREDERIK1
Top patents by PatentIndex Score
23 records- 0188US8235212B2Mask transport system configured to transport a mask into and out of a lithographic apparatusHEERENS GERT-JAN·Filed 2009·Granted Aug 7, 2012·18 cites·13 claims
- 0286US7522263B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2005·Granted Apr 21, 2009·14 cites·20 claims
- 0379US6753945B2Transfer method for a mask or substrate, storage box, apparatus adapted for use in such method, and device manufacturing method including such a transfer methodASML NETHERLANDS BV·Filed 2003·Granted Jun 22, 2004·25 cites·15 claims
- 0476US7236233B2Assembly of a reticle holder and a reticleASML NETHERLANDS BV·Filed 2004·Granted Jun 26, 2007·14 cites·17 claims
- 0568US7306680B2Method of cleaning by removing particles from surfaces, a cleaning apparatus and a lithographic projection apparatusASML NETHERLANDS BV·Filed 2003·Granted Dec 11, 2007·9 cites·18 claims
- 0665US7781237B2Alignment marker and lithographic apparatus and device manufacturing method using the sameASML NETHERLANDS BV·Filed 2005·Granted Aug 24, 2010·2 cites·25 claims
- 0763US6856376B2Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2003·Granted Feb 15, 2005·7 cites·23 claims
- 0861US7839489B2Assembly of a reticle holder and a reticleASML NETHERLANDS BV·Filed 2007·Granted Nov 23, 2010·1 cites·20 claims
- 0961US7084961B2Safety mechanism for a lithographic patterning deviceASML NETHERLANDS BV·Filed 2003·Granted Aug 1, 2006·6 cites·31 claims
- 1058US7423733B2Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning deviceASML NETHERLANDS BV·Filed 2004·Granted Sep 9, 2008·4 cites·31 claims
- 1156US7202934B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 10, 2007·4 cites·12 claims
- 1254US7466397B2Safety mechanism for a lithographic patterning deviceASML NETHERLANDS BV·Filed 2004·Granted Dec 16, 2008·3 cites·33 claims
- 1352US2017074090A1Telemetry System, a Pipe and a Method of Transmitting InformationNEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO·Filed 2016·Application pending·0 cites
- 1451US7151589B2Lithographic apparatus and patterning device transportASML NETHERLANDS BV·Filed 2004·Granted Dec 19, 2006·3 cites·32 claims
- 1549US7361911B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Apr 22, 2008·2 cites·22 claims
- 1649US2007117028A1Mask handling method, and mask and device or apparatus comprising a gripper therefor, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Application pending·0 cites
- 1742US2004180270A1Container for a mask, method of transferring lithographic masks therein and method of scanning a mask in a containerASML NETHERLANDS BV·Filed 2003·Application pending·0 cites
- 1842US2014133276A1Telemetry System, a Pipe and a Method of Transmitting InformationVOLKER ARNO WILLEM FREDERIK·Filed 2012·Application pending·0 cites
- 1940US7119346B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Oct 10, 2006·0 cites·12 claims
- 2040US2007146658A1Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2005·Application pending·0 cites
- 2138US7248340B2Lithographic apparatus and patterning device transportASML NETHERLANDS BV·Filed 2004·Granted Jul 24, 2007·0 cites·11 claims
- 2238US7053980B2Lithographic alignment systemASML NETHERLANDS BV·Filed 2004·Granted May 30, 2006·0 cites·21 claims
- 2338US2005275841A1Alignment marker and lithographic apparatus and device manufacturing method using the sameASML NETHERLANDS BV·Filed 2004·Application pending·0 cites
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