Inventor · disambiguated record
Herman J. Boeglin
Also filed as: BOEGLIN HERMAN J
6 granted patents·135 citations·filing 1983–2004
84Inventor score
Top patents by PatentIndex Score
6 records- 0182US5551309AComputer-controlled chemical dispensing with alternative operating modesOLIN CORP·Filed 1995·Granted Sep 3, 1996·80 cites·3 claims
- 0263US5061514AChemical vapor deposition (CVD) process for plasma depositing silicon carbide films onto a substrateOLIN CORP·Filed 1990·Granted Oct 29, 1991·25 cites·12 claims
- 0359US7042160B2Parallel plate electron multiplier with ion feedback suppressionITT MFG ENTERPRISES INC·Filed 2004·Granted May 9, 2006·5 cites·15 claims
- 0451US5053255AChemical vapor deposition (CVD) process for the thermally depositing silicon carbide films onto a substrateOLIN CORP·Filed 1990·Granted Oct 1, 1991·15 cites·12 claims
- 0534US4798764AArsenate dopant sources and method of making the sourcesSTEMCOR CORP·Filed 1983·Granted Jan 17, 1989·6 cites·16 claims
- 0629US5721176AUse of oxalyl chloride to form chloride-doped silicon dioxide films of silicon substratesOLIN CORP·Filed 1992·Granted Feb 24, 1998·4 cites·9 claims
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