Inventor · disambiguated record
Patricia Vreugdewater
Also filed as: VREUGDEWATER PATRICIA
9 granted patents·91 citations·filing 2004–2008
87Inventor score
Files withASML NETHERLANDS BV9
Top patents by PatentIndex Score
9 records- 0190US7742149B2Stage system and lithographic apparatus comprising such a stage systemASML NETHERLANDS BV·Filed 2008·Granted Jun 22, 2010·15 cites·5 claims
- 0287US7145269B2Lithographic apparatus, Lorentz actuator, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Dec 5, 2006·30 cites·16 claims
- 0369US7245047B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 17, 2007·14 cites·21 claims
- 0464US7005823B2Positioning system and positioning methodASML NETHERLANDS BV·Filed 2004·Granted Feb 28, 2006·9 cites·16 claims
- 0561US7095485B2Lithographic linear motor, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 22, 2006·10 cites·17 claims
- 0652US7161267B2Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Jan 9, 2007·6 cites·15 claims
- 0749US7079226B2Lithographic actuator mechanism, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Jul 18, 2006·2 cites·19 claims
- 0847US7224429B2Lithographic apparatus, device manufacturing method and positioning systemASML NETHERLANDS BV·Filed 2004·Granted May 29, 2007·3 cites·25 claims
- 0946US7088428B2Lithographic actuator mechanism, lithographic apparatus, and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted Aug 8, 2006·2 cites·21 claims
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