Inventor · disambiguated record
Chui-Ya Peng
Also filed as: PENG CHUI-YA
31 granted patents·4 pending applications·37 citations·filing 2013–2024
95Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD35
Top patents by PatentIndex Score
35 records- 0197US12080567B2Systems and methods for in-situ Marangoni cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 3, 2024·3 cites·20 claims
- 0291US9589969B1Semiconductor device and manufacturing method of the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Mar 7, 2017·10 cites·20 claims
- 0388US11923210B2Systems and methods for in-situ Marangoni cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 5, 2024·3 cites·20 claims
- 0486US12482675B2Systems and methods for in-situ Marangoni cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Nov 25, 2025·0 cites·20 claims
- 0584US9780209B1Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Oct 3, 2017·5 cites·20 claims
- 0683US10515861B2Method for calibrating temperature in chemical vapor depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 24, 2019·3 cites·20 claims
- 0783US10319857B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jun 11, 2019·3 cites·20 claims
- 0882US12507472B2Method of making polysilicon structure including protective layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 23, 2025·0 cites·20 claims
- 0982US2024178013A1Systems and methods for in-situ marangoni cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1081US10818563B2Method for calibrating temperature in chemical vapor depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 27, 2020·2 cites·20 claims
- 1181US10325796B2Apparatus and system for detecting wafer damageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jun 18, 2019·4 cites·20 claims
- 1281US2025105037A1System and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1380US12198953B2System and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 14, 2025·0 cites·20 claims
- 1477US9812570B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Nov 7, 2017·2 cites·20 claims
- 1575US10784079B2Ion implantation system and source bushing thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 22, 2020·1 cites·20 claims
- 1675US2024363377A1Systems and methods for shuttered wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1774US11721567B2System and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 8, 2023·0 cites·20 claims
- 1873US12068179B2Systems and methods for shuttered wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
- 1971US11855086B2Polysilicon structure including protective layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·0 cites·20 claims
- 2069US11735440B2Automated wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 22, 2023·0 cites·20 claims
- 2168US11610825B2Method for calibrating temperature in chemical vapor depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 21, 2023·0 cites·20 claims
- 2268US11411108B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 9, 2022·0 cites·20 claims
- 2367US11282673B2Ion implantation system and source bushing thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 22, 2022·0 cites·20 claims
- 2462US11227780B2System and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 18, 2022·0 cites·20 claims
- 2562US9978634B2Method for fabricating shallow trench isolation and semiconductor structure using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted May 22, 2018·1 cites·20 claims
- 2661US10818790B2Semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 27, 2020·0 cites·20 claims
- 2760US11355366B2Systems and methods for shuttered wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 7, 2022·0 cites·19 claims
- 2860US10957697B2Polysilicon structure including protective layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 23, 2021·0 cites·14 claims
- 2957US11342202B2Automated wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 24, 2022·0 cites·22 claims
- 3055US10050035B2Method of making protective layer over polysilicon structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 14, 2018·0 cites·20 claims
- 3148US11527380B2Ion implanter toxic gas delivery systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Dec 13, 2022·0 cites·20 claims
- 3247US9324603B2Semiconductor structures with shallow trench isolationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Apr 26, 2016·0 cites·23 claims
- 3341US2020058521A1Wafer cleaning with dynamic contactsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Application pending·0 cites
- 3440US11162174B2Liquid delivery and vaporization apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 2, 2021·0 cites·20 claims
- 3537US11139183B2Systems and methods for dry wafer transportTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 5, 2021·0 cites·20 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →