Inventor · disambiguated record
Anupama Mallikarjunan
Also filed as: MALLIKARJUNAN ANUPAMA
20 granted patents·7 pending applications·91 citations·filing 2002–2024
93Inventor score
Top patents by PatentIndex Score
27 records- 0197US11152206B2Compositions and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2020·Granted Oct 19, 2021·4 cites·2 claims
- 0295US9337018B2Methods for depositing films with organoaminodisilane precursorsAIR PROD & CHEM·Filed 2013·Granted May 10, 2016·15 cites·45 claims
- 0393US7585704B2Method of producing highly strained PECVD silicon nitride thin films at low temperatureIBM·Filed 2005·Granted Sep 8, 2009·28 cites·23 claims
- 0492US10145008B2Compositions and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2016·Granted Dec 4, 2018·8 cites·20 claims
- 0590US9905415B2Methods for depositing silicon nitride filmsAIR PROD & CHEM·Filed 2014·Granted Feb 27, 2018·10 cites·15 claims
- 0686US2024304438A1Composition and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2024·Application pending·0 cites
- 0783US8278222B2Selective etching and formation of xenon difluorideWU DINGJUN·Filed 2009·Granted Oct 2, 2012·12 cites·9 claims
- 0883US2023377874A1Composition and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2023·Application pending·0 cites
- 0982US10319862B2Barrier materials for display devicesAIR PROD & CHEM·Filed 2013·Granted Jun 11, 2019·6 cites·10 claims
- 1079US9879340B2Silicon-based films and methods of forming the sameAIR PROD & CHEM·Filed 2015·Granted Jan 30, 2018·1 cites·5 claims
- 1178US11742200B2Composition and methods using same for carbon doped silicon containing filmsVERSUM MAT US LLC·Filed 2021·Granted Aug 29, 2023·0 cites·5 claims
- 1277US10283348B2High temperature atomic layer deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2017·Granted May 7, 2019·2 cites·13 claims
- 1374US9613799B2Methods for depositing films with organoaminodisilane precursorsAIR PROD & CHEM·Filed 2016·Granted Apr 4, 2017·1 cites·14 claims
- 1468US10422034B2Silicon-based films and methods of forming the sameVERSUM MAT US LLC·Filed 2017·Granted Sep 24, 2019·0 cites·12 claims
- 1566US11626279B2Compositions and methods for making silicon containing filmsVERSUM MAT US LLC·Filed 2013·Granted Apr 11, 2023·2 cites·13 claims
- 1664US10283350B2Methods for depositing films with organoaminodisilane precursorsVERSUM MAT US LLC·Filed 2018·Granted May 7, 2019·0 cites·14 claims
- 1764US10077364B2Organoaminodisilane precursors and methods for depositing films comprising sameVERSUM MAT US LLC·Filed 2017·Granted Sep 18, 2018·0 cites·25 claims
- 1863US9997350B2Methods for depositing films with organoaminodisilane precursorsVERSUM MAT US LLC·Filed 2017·Granted Jun 12, 2018·0 cites·16 claims
- 1962US8889235B2Dielectric barrier deposition using nitrogen containing precursorMALLIKARJUNAN ANUPAMA·Filed 2010·Granted Nov 18, 2014·2 cites·7 claims
- 2061US9627193B2Organoaminodisilane precursors and methods for depositing films comprising sameAIR PROD & CHEM·Filed 2014·Granted Apr 18, 2017·0 cites·20 claims
- 2160US2018033614A1Compositions and Methods Using Same for Carbon Doped Silicon Containing FilmsVERSUM MAT US LLC·Filed 2017·Application pending·0 cites
- 2256US12205061B2Shared data induced quality control for a chemical mechanical planarization processVERSUM MAT US LLC·Filed 2022·Granted Jan 21, 2025·0 cites·19 claims
- 2346US12163224B2Methods for depositing a conformal metal or metalloid silicon nitride filmVERSUM MAT US LLC·Filed 2016·Granted Dec 10, 2024·0 cites·5 claims
- 2441US2013247971A1Oxygen Containing Precursors for Photovoltaic PassivationHAAS MARY KATHRYN·Filed 2012·Application pending·0 cites
- 2537US2003087534A1Surface modification for barrier to ionic penetrationRENSSELAER POLYTECH INST·Filed 2002·Application pending·0 cites
- 2634US2015275355A1Compositions and methods for the deposition of silicon oxide filmsAIR PROD & CHEM·Filed 2015·Application pending·0 cites
- 2729US2013220410A1Precursors for Photovoltaic PassivationHAAS MARY KATHRYN·Filed 2012·Application pending·0 cites
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