Inventor · disambiguated record
Hiroshi Sotozaki
Also filed as: SOTOZAKI HIROSHI
20 granted patents·9 pending applications·225 citations·filing 1999–2025
94Inventor score
Top patents by PatentIndex Score
29 records- 0195US10486285B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2017·Granted Nov 26, 2019·9 cites·10 claims
- 0293US9358662B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 7, 2016·9 cites·21 claims
- 0392US8795032B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodMIYAZAKI MITSURU·Filed 2009·Granted Aug 5, 2014·22 cites·14 claims
- 0491US9434044B2Polishing apparatusEBARA CORP·Filed 2015·Granted Sep 6, 2016·8 cites·14 claims
- 0591US6643882B1Substrate cleaning apparatusEBARA CORP·Filed 2000·Granted Nov 11, 2003·64 cites·20 claims
- 0690US11007621B2Polishing apparatus and polishing methodEBARA CORP·Filed 2018·Granted May 18, 2021·3 cites·8 claims
- 0781US6851152B2Substrate cleaning apparatusEBARA CORP·Filed 2001·Granted Feb 8, 2005·28 cites·16 claims
- 0880US11426834B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2019·Granted Aug 30, 2022·1 cites·2 claims
- 0978US6494985B1Method and apparatus for polishing a substrateEBARA CORP·Filed 1999·Granted Dec 17, 2002·44 cites·15 claims
- 1078US2025387868A1Polishing apparatusEBARA CORP·Filed 2025·Application pending·0 cites
- 1177US6616512B2Substrate cleaning apparatus and substrate polishing apparatus with substrate cleaning apparatusEBARA CORP·Filed 2001·Granted Sep 9, 2003·20 cites·17 claims
- 1276US11612983B2Polishing apparatus and polishing methodEBARA CORP·Filed 2021·Granted Mar 28, 2023·0 cites·9 claims
- 1374US2025058431A1Apparatus for polishing, processing system, and method of polishingEBARA CORP·Filed 2024·Application pending·0 cites
- 1472US7850817B2Polishing device and substrate processing deviceEBARA CORP·Filed 2003·Granted Dec 14, 2010·15 cites·9 claims
- 1566US9530676B2Substrate processing apparatus, substrate transfer method and substrate transfer deviceYOKOYAMA TOSHIO·Filed 2012·Granted Dec 27, 2016·2 cites·9 claims
- 1662US2024227115A1Polishing apparatusEBARA CORP·Filed 2022·Application pending·0 cites
- 1761US9687957B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 27, 2017·0 cites·29 claims
- 1860US12179312B2Apparatus for polishing, processing system, and method of polishingEBARA CORP·Filed 2021·Granted Dec 31, 2024·0 cites·19 claims
- 1957US2024363372A1Substrate processing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 2055US10661411B2Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surfaceEBARA CORP·Filed 2015·Granted May 26, 2020·0 cites·10 claims
- 2153US11642755B2Apparatus for polishing and method for polishingEBARA CORP·Filed 2019·Granted May 9, 2023·0 cites·21 claims
- 2249US10987776B2Calibration method and non-transitory computer-readable storage medium storing a program of calibrationEBARA CORP·Filed 2018·Granted Apr 27, 2021·0 cites·8 claims
- 2348US2009067959A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2007·Application pending·0 cites
- 2446US2012193506A1Substrate processing apparatus, substrate transfer apparatus, substrate clamp apparatus, and chemical liquid treatment apparatusTAKAHASHI NOBUYUKI·Filed 2012·Application pending·0 cites
- 2546US2015221536A1Substrate processing apparatus, substrate transfer method and substrate transfer deviceEBARA CORP·Filed 2015·Application pending·0 cites
- 2644US10730162B2Turntable cloth peeling jigEBARA CORP·Filed 2017·Granted Aug 4, 2020·0 cites·10 claims
- 2742US11465256B2Apparatus for polishing and method for polishingEBARA CORP·Filed 2019·Granted Oct 11, 2022·0 cites·10 claims
- 2841US2004155013A1Method and apparatus for polishing a substrateFiled 2004·Application pending·0 cites
- 2940US2003051812A1Method and apparatus for polishing a substrateFiled 2002·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →