Inventor · disambiguated record
Zi-Wen Chen
Also filed as: Chen zi-wen
5 granted patents·2 pending applications·2 citations·filing 2018–2023
66Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD7
Top patents by PatentIndex Score
7 records- 0187US10534279B1Methods and apparatus for removing contamination from lithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 14, 2020·2 cites·20 claims
- 0270US10852649B2Methods and apparatus for removing contamination from lithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Dec 1, 2020·0 cites·20 claims
- 0365US11657492B2Reticle backside inspection methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 23, 2023·0 cites·20 claims
- 0462US10509334B2Methods and apparatus for removing contamination from lithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 17, 2019·0 cites·14 claims
- 0557US10997706B2Reticle backside inspection methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 4, 2021·0 cites·20 claims
- 0651US2024419082A1Lithography system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0751US2024385509A1Lithography system and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →