Inventor · disambiguated record
Guojing Zhang
Also filed as: ZHANG GUOJING
12 granted patents·3 pending applications·235 citations·filing 1997–2022
91Inventor score
Top patents by PatentIndex Score
15 records- 0195US11194246B1Monolithically framed pellicle membrane suitable for lithography in the fabrication of integrated circuitsINTEL CORP·Filed 2020·Granted Dec 7, 2021·4 cites·21 claims
- 0293US12209975B2Real-time detection of deflections and ruptures of EUV pellicle membranesINTEL CORP·Filed 2022·Granted Jan 28, 2025·2 cites·12 claims
- 0389US6610447B2Extreme ultraviolet mask with improved absorberINTEL CORP·Filed 2001·Granted Aug 26, 2003·31 cites·7 claims
- 0488US6720118B2Enhanced inspection of extreme ultraviolet maskINTEL CORP·Filed 2003·Granted Apr 13, 2004·29 cites·18 claims
- 0586US5928817AMethod of protecting an EUV mask from damage and contaminationINTEL CORP·Filed 1997·Granted Jul 27, 1999·63 cites·10 claims
- 0684US6583068B2Enhanced inspection of extreme ultraviolet maskINTEL CORP·Filed 2001·Granted Jun 24, 2003·23 cites·10 claims
- 0781US5958629AUsing thin films as etch stop in EUV mask fabrication processINTEL CORP·Filed 1997·Granted Sep 28, 1999·46 cites·18 claims
- 0880US6905801B2High performance EUV maskINTEL CORP·Filed 2002·Granted Jun 14, 2005·20 cites·27 claims
- 0974US11561466B2Monolithically framed pellicle membrane suitable for lithography in the fabrication of integrated circuitsINTEL CORP·Filed 2021·Granted Jan 24, 2023·0 cites·20 claims
- 1074US6908714B2Absorber layer for EUVINTEL CORP·Filed 2003·Granted Jun 21, 2005·17 cites·19 claims
- 1158US11604406B2Method and apparatus for fabrication of very large scale integration pattern features via electroless deposition on extreme ultraviolet lithography photomasksINTEL CORP·Filed 2019·Granted Mar 14, 2023·0 cites·22 claims
- 1253US11300885B2EUV phase-shift SRAF masks by means of embedded phase shift layersINTEL CORP·Filed 2018·Granted Apr 12, 2022·0 cites·24 claims
- 1344US2023032696A1Workpiece exchange device and methodKEDE NUMERICAL CONTROL CO LTD·Filed 2020·Application pending·0 cites
- 1442US2019375135A1Light guide plate with annular microprism structures and its manufacturing methodUNIV SHENZHEN·Filed 2018·Application pending·0 cites
- 1541US2020050097A1Novel method for fabrication of euv photomask fiducialsINTEL CORP·Filed 2018·Application pending·0 cites
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