Inventor · disambiguated record
Tomoyuki Morita
Also filed as: MORITA TOMOYUKI
12 granted patents·9 pending applications·49 citations·filing 2000–2015
87Inventor score
Top patents by PatentIndex Score
21 records- 0179US6875819B2Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the sameMITSUI CHEMICALS INC·Filed 2002·Granted Apr 5, 2005·18 cites·15 claims
- 0273US8759797B2Drawing apparatus, drawing method, and method of manufacturing articleCANON KK·Filed 2013·Granted Jun 24, 2014·3 cites·4 claims
- 0366US9040935B2Blanking apparatus, drawing apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted May 26, 2015·1 cites·11 claims
- 0463US7588671B2Microfluidic treatment method and deviceEBARA CORP·Filed 2004·Granted Sep 15, 2009·12 cites·11 claims
- 0555US9171698B2Drawing apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted Oct 27, 2015·0 cites·13 claims
- 0654US6780764B2Method of forming a patterned tungsten damascene interconnectOKI ELECTRIC IND CO LTD·Filed 2002·Granted Aug 24, 2004·7 cites·5 claims
- 0754US6706645B2Method of manufacturing a semiconductor deviceOKI ELECTRIC IND CO LTD·Filed 2002·Granted Mar 16, 2004·4 cites·19 claims
- 0853US6458716B1Method of manufacturing a semiconductor deviceOKI ELECTRIC IND CO LTD·Filed 2000·Granted Oct 1, 2002·4 cites·14 claims
- 0951US8618497B2Drawing apparatus, method of manufacturing article, and information processing apparatusCANON KK·Filed 2013·Granted Dec 31, 2013·0 cites·8 claims
- 1048US9245715B2Drawing apparatus, and method of manufacturing articleCANON KK·Filed 2013·Granted Jan 26, 2016·0 cites·13 claims
- 1146US2015129779A1Drawing apparatus, and method of manufacturing articleCANON KK·Filed 2014·Application pending·0 cites
- 1246US2008166770A1Method and apparatus for amplifying and synthesisizing nucleic acid with denaturantEBARA CORP·Filed 2007·Application pending·0 cites
- 1346US2015131075A1Drawing apparatus, and method of manufacturing articleCANON KK·Filed 2014·Application pending·0 cites
- 1445US9236224B2Drawing apparatus and method of manufacturing articleCANON KK·Filed 2014·Granted Jan 12, 2016·0 cites·10 claims
- 1544US2009294287A1Microchip electrophoresis method and deviceEBARA CORP·Filed 2006·Application pending·0 cites
- 1644US2014113234A1Lithography apparatus, and method of manufacturing an articleCANON KK·Filed 2013·Application pending·0 cites
- 1739US2013199719A1Drawing apparatus, and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
- 1835US2016126061A1Drawing apparatus and device manufacturing methodCANON KK·Filed 2015·Application pending·0 cites
- 1934US8927945B2Drawing apparatus and method of manufacturing article by controlling drawing on shot region side of boundary of shot regionsMORITA TOMOYUKI·Filed 2012·Granted Jan 6, 2015·0 cites·4 claims
- 2034US2012107748A1Drawing apparatus and method of manufacturing articleMORITA TOMOYUKI·Filed 2011·Application pending·0 cites
- 2126US2005227166A1Active energy ray sensitive resin composition, active energy ray sensitive resin film and method for forming pattern using said filmICHIMURA KUNIHIRO·Filed 2003·Application pending·0 cites
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