Inventor · disambiguated record
Toshiharu Miwa
Also filed as: MIWA TOSHIHARU
11 granted patents·3 pending applications·113 citations·filing 2001–2013
90Inventor score
Top patents by PatentIndex Score
14 records- 0187US8566070B2Apparatus abnormality monitoring method and systemTAMAKI KENJI·Filed 2010·Granted Oct 22, 2013·10 cites·8 claims
- 0286US7289859B2Method for determining parameter of product design and its supporting systemHITACHI LTD·Filed 2006·Granted Oct 30, 2007·17 cites·15 claims
- 0381US8676553B2Apparatus abnormality diagnosis method and systemMIWA TOSHIHARU·Filed 2009·Granted Mar 18, 2014·13 cites·15 claims
- 0481US8515719B2Apparatus anomaly monitoring method and systemTAMAKI KENJI·Filed 2009·Granted Aug 20, 2013·12 cites·17 claims
- 0577US6721940B2Exposure processing method and exposure system for the sameHITACHI LTD·Filed 2002·Granted Apr 13, 2004·18 cites·4 claims
- 0675US6697698B2Overlay inspection apparatus for semiconductor substrate and method thereofHITACHI LTD·Filed 2002·Granted Feb 24, 2004·16 cites·2 claims
- 0774US8043772B2Manufacturing method and manufacturing system of semiconductor deviceRENESAS ELECTRONICS CORP·Filed 2009·Granted Oct 25, 2011·4 cites·5 claims
- 0871US9147913B2Diagnosis system and diagnosis method for lithium ion secondary batteryMIWA TOSHIHARU·Filed 2010·Granted Sep 29, 2015·2 cites·7 claims
- 0966US6801827B2Overlay inspection apparatus for semiconductor substrate and method thereofHITACHI LTD·Filed 2002·Granted Oct 5, 2004·9 cites·13 claims
- 1058US7036084B2Industrial equipment and systemTOYOTA JIDOSHOKKI KK·Filed 2002·Granted Apr 25, 2006·7 cites·15 claims
- 1158US6653032B2Exposure methodHITACHI LTD·Filed 2001·Granted Nov 25, 2003·5 cites·4 claims
- 1256US2015242822A1Maintenance device, maintenance system, and maintenance programHITACHI LTD·Filed 2013·Application pending·0 cites
- 1341US2013335009A1Inspection System, Charger/Discharger, and Inspection Method of Secondary BatteryHITACHI LTD·Filed 2013·Application pending·0 cites
- 1440US2015046109A1Battery system maintenance management system and methodHITACHI LTD·Filed 2013·Application pending·0 cites
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