Inventor · disambiguated record
Sungmin Huh
Also filed as: HUH SUNGMIN
3 granted patents·7 citations·filing 2006–2011
61Inventor score
Top patents by PatentIndex Score
3 records- 0167US7629087B2Photomask, method of making a photomask and photolithography method and system using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted Dec 8, 2009·4 cites·59 claims
- 0262US8048595B2Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomaskSAMSUNG ELECTRONICS CO LTD·Filed 2009·Granted Nov 1, 2011·2 cites·17 claims
- 0356US8216748B2Extreme ultraviolet photomaskJANG ILYONG·Filed 2011·Granted Jul 10, 2012·1 cites·17 claims
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