Inventor · disambiguated record
Tong Earn Tay
Also filed as: TAY TONG EARN
3 granted patents·30 citations·filing 2001–2004
70Inventor score
Technology areasH10P
Files withCHARTERED SEMICONDUCTOR MFG3
Top patents by PatentIndex Score
3 records- 0173US6797605B2Method to improve adhesion of dielectric films in damascene interconnectsCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted Sep 28, 2004·17 cites·19 claims
- 0257US6513374B2Apparatus to quantify the adhesion of filmCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted Feb 4, 2003·9 cites·24 claims
- 0353US7078333B2Method to improve adhesion of dielectric films in damascene interconnectsCHARTERED SEMICONDUCTOR MFG·Filed 2004·Granted Jul 18, 2006·4 cites·11 claims
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