Inventor · disambiguated record
Siew Lok Toh
Also filed as: TOH SIEW LOK
4 granted patents·35 citations·filing 2001–2004
75Inventor score
Top patents by PatentIndex Score
4 records- 0173US6797605B2Method to improve adhesion of dielectric films in damascene interconnectsCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted Sep 28, 2004·17 cites·19 claims
- 0257US6513374B2Apparatus to quantify the adhesion of filmCHARTERED SEMICONDUCTOR MFG·Filed 2001·Granted Feb 4, 2003·9 cites·24 claims
- 0353US7078333B2Method to improve adhesion of dielectric films in damascene interconnectsCHARTERED SEMICONDUCTOR MFG·Filed 2004·Granted Jul 18, 2006·4 cites·11 claims
- 0444US7127949B2Contact pressure sensor and method for manufacturing the sameUNIV SINGAPORE·Filed 2003·Granted Oct 31, 2006·5 cites·12 claims
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