Inventor · disambiguated record
Marilyn I. Wright
Also filed as: WRIGHT MARILYN · WRIGHT MARILYN I · WRIGHT MARILYN IRENE
25 granted patents·795 citations·filing 2000–2008
97Inventor score
Files withADVANCED MICRO DEVICES INC21FREESCALE SEMICONDUCTOR INC2ADVANCED MIRCO DEVICES INC1MOTOROLA INC1
Top patents by PatentIndex Score
25 records- 0198US6893967B1L-shaped spacer incorporating or patterned using amorphous carbon or CVD organic materialsADVANCED MICRO DEVICES INC·Filed 2004·Granted May 17, 2005·246 cites·16 claims
- 0294US6774998B1Method and apparatus for identifying misregistration in a complimentary phase shift mask processADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 10, 2004·59 cites·61 claims
- 0393US6716646B1Method and apparatus for performing overlay measurements using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Apr 6, 2004·69 cites·12 claims
- 0491US6764949B2Method for reducing pattern deformation and photoresist poisoning in semiconductor device fabricationADVANCED MICRO DEVICES INC·Filed 2002·Granted Jul 20, 2004·53 cites·18 claims
- 0589US6900002B1Antireflective bi-layer hardmask including a densified amorphous carbon layerADVANCED MICRO DEVICES INC·Filed 2002·Granted May 31, 2005·45 cites·7 claims
- 0688US6509201B1Method and apparatus for monitoring wafer stressADVANCED MICRO DEVICES INC·Filed 2001·Granted Jan 21, 2003·42 cites·37 claims
- 0786US6479309B1Method and apparatus for determining process layer conformalityADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 12, 2002·34 cites·66 claims
- 0885US6864556B1CVD organic polymer film for advanced gate patterningADVANCED MICRO DEVICES INC·Filed 2002·Granted Mar 8, 2005·30 cites·18 claims
- 0985US6650423B1Method and apparatus for determining column dimensions using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Nov 18, 2003·34 cites·59 claims
- 1083US7262864B1Method and apparatus for determining grid dimensions using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 28, 2007·22 cites·47 claims
- 1179US7861195B2Process for design of semiconductor circuitsADVANCED MIRCO DEVICES INC·Filed 2008·Granted Dec 28, 2010·10 cites·7 claims
- 1279US7109101B1Capping layer for reducing amorphous carbon contamination of photoresist in semiconductor device manufacture; and process for making sameMOTOROLA INC·Filed 2003·Granted Sep 19, 2006·26 cites·15 claims
- 1376US6426262B1Method of analyzing the effects of shadowing of angled halo implantsADVANCED MICRO DEVICES INC·Filed 2000·Granted Jul 30, 2002·18 cites·24 claims
- 1474US6773939B1Method and apparatus for determining critical dimension variation in a line structureADVANCED MICRO DEVICES INC·Filed 2001·Granted Aug 10, 2004·15 cites·26 claims
- 1574US6458610B1Method and apparatus for optical film stack fault detectionADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 1, 2002·20 cites·43 claims
- 1671US6657716B1Method and apparatus for detecting necking over field/active transitionsADVANCED MICRO DEVICES INC·Filed 2001·Granted Dec 2, 2003·14 cites·28 claims
- 1768US6972255B2Semiconductor device having an organic anti-reflective coating (ARC) and method thereforADVANCED MICRO DEVICES INC·Filed 2003·Granted Dec 6, 2005·10 cites·14 claims
- 1868US6697153B1Method and apparatus for analyzing line structuresADVANCED MICRO DEVICES INC·Filed 2002·Granted Feb 24, 2004·11 cites·34 claims
- 1965US6913958B1Method for patterning a feature using a trimmed hardmaskADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 5, 2005·9 cites·5 claims
- 2065US6764947B1Method for reducing gate line deformation and reducing gate line widths in semiconductor devicesADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 20, 2004·9 cites·13 claims
- 2164US6804014B1Method and apparatus for determining contact opening dimensions using scatterometryADVANCED MICRO DEVICES INC·Filed 2001·Granted Oct 12, 2004·7 cites·74 claims
- 2260US6766215B1Method and apparatus for detecting necking over field/active transitionsADVANCED MICRO DEVICES INC·Filed 2003·Granted Jul 20, 2004·8 cites·9 claims
- 2355US6261936B1Poly gate CD passivation for metrology controlADVANCED MICRO DEVICES INC·Filed 2000·Granted Jul 17, 2001·4 cites·20 claims
- 2452US8039389B2Semiconductor device having an organic anti-reflective coating (ARC) and method thereforFREESCALE SEMICONDUCTOR INC·Filed 2007·Granted Oct 18, 2011·0 cites·2 claims
- 2549US7199429B2Semiconductor device having an organic anti-reflective coating (ARC) and method thereforFREESCALE SEMICONDUCTOR INC·Filed 2005·Granted Apr 3, 2007·0 cites·6 claims
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