Inventor · disambiguated record
Enio Carpi
Also filed as: CARPI ENIO · CARPI ENIO L · CARPI ENIO LUIZ
7 granted patents·2 pending applications·72 citations·filing 1999–2004
84Inventor score
Top patents by PatentIndex Score
9 records- 0178US6888260B2Alignment or overlay marks for semiconductor processingINFINEON TECHNOLOGIES AG·Filed 2003·Granted May 3, 2005·28 cites·37 claims
- 0273US6767674B2Method for obtaining elliptical and rounded shapes using beam shapingINFINEON TECHNOLOGIES AG·Filed 2001·Granted Jul 27, 2004·14 cites·22 claims
- 0360US7150946B2Method for the repair of defects in photolithographic masks for patterning semiconductor wafersINFINEON TECHNOLOGIES AG·Filed 2004·Granted Dec 19, 2006·6 cites·25 claims
- 0448US6801314B2Alignment system and method using bright spot and box structureINFINEON TECHNOLOGIES AG·Filed 2001·Granted Oct 5, 2004·2 cites·11 claims
- 0548US6114074AExtrusion enhanced mask for improving process windowSIEMENS AG·Filed 1999·Granted Sep 5, 2000·11 cites·21 claims
- 0646US6368516B1Semiconductor manufacturing methodsINFINEON TECHNOLOGIES CORP·Filed 1999·Granted Apr 9, 2002·10 cites·12 claims
- 0734US2003147077A1Mask alignment methodINFINEON TECHNOLOGIES CORP·Filed 2002·Application pending·0 cites
- 0833US6784070B2Intra-cell mask alignment for improved overlayINFINEON TECHNOLOGIES AG·Filed 2002·Granted Aug 31, 2004·1 cites·17 claims
- 0929US2004121264A1Pattern transfer in device fabricationFiled 2002·Application pending·0 cites
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