Inventor · disambiguated record
Hann-Ru Chen
Also filed as: CHEN HANN-RU
5 granted patents·2 pending applications·10 citations·filing 2006–2024
71Inventor score
Top patents by PatentIndex Score
7 records- 0181US11062886B2Apparatus and method for controlling wafer uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 13, 2021·4 cites·18 claims
- 0279US9639774B2Method for determining applicabilty of a processing device, a processing path and a processing patternTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2012·Granted May 2, 2017·5 cites·11 claims
- 0367US11107708B2Heating platform, thermal treatment and manufacturing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 31, 2021·1 cites·19 claims
- 0462US12142497B2Heating platform, thermal treatment and manufacturing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 12, 2024·0 cites·20 claims
- 0556US2024387203A1Heating platform, thermal treatment and manufacturing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0656US2021296100A1Apparatus and method for controlling wafer uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Application pending·0 cites
- 0735US7589005B2Methods of forming semiconductor structures and systems for forming semiconductor structuresTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Sep 15, 2009·0 cites·14 claims
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