Inventor · disambiguated record
Mitsutoshi Koyama
Also filed as: KOYAMA MITSUTOSHI
9 granted patents·279 citations·filing 1984–2001
90Inventor score
Top patents by PatentIndex Score
9 records- 0191US4485000ASputtering target supporting deviceTOSHIBA KK·Filed 1984·Granted Nov 27, 1984·41 cites·5 claims
- 0290US5189503AHigh dielectric capacitor having low current leakageTOSHIBA KK·Filed 1991·Granted Feb 23, 1993·128 cites·12 claims
- 0364US5127365AVertical heat-treatment apparatus for semiconductor partsTOSHIBA KK·Filed 1991·Granted Jul 7, 1992·39 cites·13 claims
- 0457US5990008ASemiconductor device with pure copper wirings and method of manufacturing a semiconductor device with pure copper wiringsTOSHIBA KK·Filed 1997·Granted Nov 23, 1999·19 cites·45 claims
- 0557US5589421AMethod of manufacturing annealed filmsTOSHIBA KK·Filed 1994·Granted Dec 31, 1996·27 cites·6 claims
- 0646US6812136B2Method of making a semiconductor device having a multilayer metal film of titanium/titanium nitride/tungsten/tungsten carbideTOKYO SHIBAURA ELECTRIC CO·Filed 2001·Granted Nov 2, 2004·2 cites·24 claims
- 0746US5380399AMethod of treating semiconductor substratesTOSHIBA KK·Filed 1993·Granted Jan 10, 1995·15 cites·30 claims
- 0835US5111272ASemiconductor device having element regions electrically isolated from each otherTOSHIBA KK·Filed 1991·Granted May 5, 1992·7 cites·6 claims
- 0931US6424045B2Semiconductor device with pure copper wirings and method of manufacturing a semiconductor device with pure copper wiringsTOSHIBA KK·Filed 1999·Granted Jul 23, 2002·1 cites·19 claims
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