Inventor · disambiguated record
Si Woong Woo
Also filed as: WOO SI WOONG
1 granted patent·1 pending application·0 citations·filing 2019–2022
7Inventor score
Files withSAMSUNG ELECTRONICS CO LTD2
Top patents by PatentIndex Score
2 records- 0154US2023115922A1Method for monitoring substrate, method for fabricating semiconductor device using the same, and substrate process system using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 0245US10635006B2Chuck-driving device and substrate-processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Apr 28, 2020·0 cites·19 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →