Inventor · disambiguated record
Ole Waldmann
Also filed as: WALDMANN OLE
7 granted patents·14 citations·filing 2013–2018
79Inventor score
Technology areasH10P
Files withLAM RES CORP7
Top patents by PatentIndex Score
7 records- 0190US9779974B2System and method for reducing temperature transition in an electrostatic chuckLAM RES CORP·Filed 2015·Granted Oct 3, 2017·6 cites·18 claims
- 0281US10096506B2Reducing temperature transition in a substrate supportLAM RES CORP·Filed 2018·Granted Oct 9, 2018·2 cites·20 claims
- 0374US9922855B2Method for reducing temperature transition in an electrostatic chuckLAM RES CORP·Filed 2017·Granted Mar 20, 2018·1 cites·14 claims
- 0470US9716022B2Method of determining thermal stability of a substrate support assemblyLAM RES CORP·Filed 2013·Granted Jul 25, 2017·2 cites·21 claims
- 0569US9435692B2Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature outputLAM RES CORP·Filed 2014·Granted Sep 6, 2016·2 cites·20 claims
- 0664US9543171B2Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control elementLAM RES CORP·Filed 2014·Granted Jan 10, 2017·1 cites·22 claims
- 0750US10437236B2Method of determining thermal stability of a substrate support assemblyLAM RES CORP·Filed 2017·Granted Oct 8, 2019·0 cites·20 claims
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