Inventor · disambiguated record

Kuan-Fu Chang

Also filed as: CHANG KUAN-FU

1 granted patent·18 citations·filing 2002–2002

39Inventor score

Technology areasB24B

Files withPROMOS TECHNOLOGIES INC1

Top patents by PatentIndex Score

1 record

0170US6679765B2Slurry supply system disposed above the rotating platen of a chemical mechanical polishing apparatusPROMOS TECHNOLOGIES INC·Filed 2002·Granted Jan 20, 2004·18 cites·20 claims

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