Inventor · disambiguated record
Scott A. Southwick
Also filed as: SOUTHWICK SCOTT · SOUTHWICK SCOTT A
15 granted patents·1 pending application·1,093 citations·filing 1996–2012
95Inventor score
Top patents by PatentIndex Score
16 records- 0199US6368193B1Method and apparatus for planarizing and cleaning microelectronic substratesMICRON TECHNOLOGY INC·Filed 2000·Granted Apr 9, 2002·144 cites·27 claims
- 0299US6358127B1Method and apparatus for planarizing and cleaning microelectronic substratesMICRON TECHNOLOGY INC·Filed 2000·Granted Mar 19, 2002·130 cites·22 claims
- 0398US6350180B2Methods for predicting polishing parameters of polishing pads, and methods and machines for planarizing microelectronic substrate assemblies in mechanical or chemical-mechanical planarizationMICRON TECHNOLOGY INC·Filed 2001·Granted Feb 26, 2002·165 cites·9 claims
- 0498US6193588B1Method and apparatus for planarizing and cleaning microelectronic substratesMICRON TECHNOLOGY INC·Filed 1998·Granted Feb 27, 2001·154 cites·27 claims
- 0597US5782675AApparatus and method for refurbishing fixed-abrasive polishing pads used in chemical-mechanical planarization of semiconductor wafersMICRON TECHNOLOGY INC·Filed 1996·Granted Jul 21, 1998·229 cites·29 claims
- 0696US7517754B2Methods of forming semiconductor constructionsMICRON TECHNOLOGY INC·Filed 2008·Granted Apr 14, 2009·44 cites·19 claims
- 0796US6361400B2Methods for predicting polishing parameters of polishing pads, and methods and machines for planarizing microelectronic substrate assemblies in mechanical or chemical-mechanical planarizationMICRON TECHNOLOGY INC·Filed 2001·Granted Mar 26, 2002·58 cites·19 claims
- 0895US7341909B2Methods of forming semiconductor constructionsMICRON TECHNOLOGY INC·Filed 2005·Granted Mar 11, 2008·37 cites·22 claims
- 0992US6238273B1Methods for predicting polishing parameters of polishing pads and methods and machines for planarizing microelectronic substrate assemblies in mechanical or chemical-mechanical planarizationMICRON TECHNOLOGY INC·Filed 1999·Granted May 29, 2001·85 cites·17 claims
- 1091US7491641B2Method of forming a conductive line and a method of forming a conductive contact adjacent to and insulated from a conductive lineMICRON TECHNOLOGY INC·Filed 2006·Granted Feb 17, 2009·20 cites·27 claims
- 1188US6394883B1Method and apparatus for planarizing and cleaning microelectronic substratesMICRON TECHNOLOGY INC·Filed 2000·Granted May 28, 2002·22 cites·55 claims
- 1252US7118966B2Methods of forming conductive linesMICRON TECHNOLOGY INC·Filed 2004·Granted Oct 10, 2006·4 cites·44 claims
- 1344US2012175918A1Folding table and chair set with portable carrying caseSOUTHWICK SCOTT·Filed 2012·Application pending·0 cites
- 1443US6769967B1Apparatus and method for refurbishing polishing pads used in chemical-mechanical planarization of semiconductor wafersMICRON TECHNOLOGY INC·Filed 2000·Granted Aug 3, 2004·1 cites·36 claims
- 1541US6749489B2Method and apparatus for planarizing and cleaning microelectronic substratesMICRON TECHNOLOGY INC·Filed 2002·Granted Jun 15, 2004·0 cites·24 claims
- 1640US6817928B2Method and apparatus for planarizing and cleaning microelectronic substratesMICRON TECHNOLOGY INC·Filed 2001·Granted Nov 16, 2004·0 cites·3 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →