Inventor · disambiguated record

Shigeyuki Onizawa

Also filed as: ONIZAWA SHIGEYUKI

2 granted patents·587 citations·filing 2008–2010

67Inventor score

Technology areasH10P

Files withFUKAZAWA ATSUKI1 ONIZAWA SHIGEYUKI1

Top patents by PatentIndex Score

2 records

0195US8669185B2Method of tailoring conformality of Si-containing filmONIZAWA SHIGEYUKI·Filed 2010·Granted Mar 11, 2014·585 cites·14 claims
0263US8765233B2Method for forming low-carbon CVD film for filling trenchesFUKAZAWA ATSUKI·Filed 2008·Granted Jul 1, 2014·2 cites·14 claims

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