Inventor · disambiguated record
Bayu Thedjoisworo
Also filed as: THEDJOISWORO BAYU · THEDJOISWORO BAYU ATMAJA
5 granted patents·2 pending applications·36 citations·filing 2012–2014
78Inventor score
Technology areasH10P
Top patents by PatentIndex Score
7 records- 0193US8916477B2Polysilicon etch with high selectivityNOVELLUS SYSTEMS INC·Filed 2013·Granted Dec 23, 2014·17 cites·15 claims
- 0286US9034773B2Removal of native oxide with high selectivityNOVELLUS SYSTEMS INC·Filed 2013·Granted May 19, 2015·8 cites·11 claims
- 0385US9558928B2Contact clean in high-aspect ratio structuresLAM RES CORP·Filed 2014·Granted Jan 31, 2017·7 cites·20 claims
- 0466US9514954B2Peroxide-vapor treatment for enhancing photoresist-strip performance and modifying organic filmsLAM RES CORP·Filed 2014·Granted Dec 6, 2016·2 cites·20 claims
- 0565US9613825B2Photoresist strip processes for improved device integritySHAVIV ROEY·Filed 2012·Granted Apr 4, 2017·2 cites·18 claims
- 0653US2015075715A1Polysilicon etch with high selectivityNOVELLUS SYSTEMS INC·Filed 2014·Application pending·0 cites
- 0744US2016181116A1Selective nitride etchLAM RES CORP·Filed 2014·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →