Inventor · disambiguated record
Fabian Purkl
Also filed as: PURKL FABIAN
27 granted patents·4 pending applications·44 citations·filing 2011–2019
93Inventor score
Top patents by PatentIndex Score
31 records- 0192US9914636B2MEMS component including a sound-pressure-sensitive diaphragm elementBOSCH GMBH ROBERT·Filed 2016·Granted Mar 13, 2018·6 cites·9 claims
- 0290US9936298B2MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detectionBOSCH GMBH ROBERT·Filed 2016·Granted Apr 3, 2018·9 cites·14 claims
- 0384US9863901B2Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structureBOSCH GMBH ROBERT·Filed 2014·Granted Jan 9, 2018·4 cites·13 claims
- 0481US8900906B2Atomic layer deposition strengthening members and method of manufactureYAMA GARY·Filed 2012·Granted Dec 2, 2014·3 cites·19 claims
- 0576US9511998B2MEMS device having a getterBOSCH GMBH ROBERT·Filed 2014·Granted Dec 6, 2016·3 cites·12 claims
- 0674US9257587B2Suspension and absorber structure for bolometerBOSCH GMBH ROBERT·Filed 2013·Granted Feb 9, 2016·3 cites·12 claims
- 0774US9130081B2Bolometer having absorber with pillar structure for thermal shortingBOSCH GMBH ROBERT·Filed 2013·Granted Sep 8, 2015·3 cites·18 claims
- 0873US9255328B2Metamaterial and method for forming a metamaterial using atomic layer depositionBOSCH GMBH ROBERT·Filed 2014·Granted Feb 9, 2016·3 cites·14 claims
- 0972US9199838B2Thermally shorted bolometerBOSCH GMBH ROBERT·Filed 2014·Granted Dec 1, 2015·2 cites·20 claims
- 1070US10547951B2Micromechanical sound transducer system and corresponding manufacturing methodBOSCH GMBH ROBERT·Filed 2018·Granted Jan 28, 2020·1 cites·16 claims
- 1170US9368658B2Serpentine IR sensorBOSCH GMBH ROBERT·Filed 2013·Granted Jun 14, 2016·2 cites·18 claims
- 1268US9064982B2Thin-film encapsulated infrared sensorBOSCH GMBH ROBERT·Filed 2013·Granted Jun 23, 2015·2 cites·16 claims
- 1366US9945727B2Resistive switching for MEMS devicesBOSCH GMBH ROBERT·Filed 2015·Granted Apr 17, 2018·1 cites·14 claims
- 1464US9677950B2Portable device with temperature sensingBOSCH GMBH ROBERT·Filed 2014·Granted Jun 13, 2017·1 cites·20 claims
- 1563US9236522B2MEMS infrared sensor including a plasmonic lensBOSCH GMBH ROBERT·Filed 2013·Granted Jan 12, 2016·0 cites·17 claims
- 1662US10298858B2Methods to combine radiation-based temperature sensor and inertial sensor and/or camera output in a handheld/mobile deviceBOSCH GMBH ROBERT·Filed 2013·Granted May 21, 2019·1 cites·3 claims
- 1751US10563306B2Production method for a layer structure and layer structureBOSCH GMBH ROBERT·Filed 2017·Granted Feb 18, 2020·0 cites·5 claims
- 1851US2015118111A1Metal Oxide Semiconductor Sensor and Method of Forming a Metal Oxide Semiconductor Sensor Using Atomic Layer DepositionBOSCH GMBH ROBERT·Filed 2014·Application pending·0 cites
- 1950US9233842B2Passivation layer for harsh environments and methods of fabrication thereofBOSCH GMBH ROBERT·Filed 2014·Granted Jan 12, 2016·0 cites·20 claims
- 2050US9093594B2Multi-stack film bolometerBOSCH GMBH ROBERT·Filed 2013·Granted Jul 28, 2015·0 cites·20 claims
- 2150US9064800B2Method of manufacturing a sensor device having a porous thin-film metal electrodeBOSCH GMBH ROBERT·Filed 2013·Granted Jun 23, 2015·0 cites·14 claims
- 2249US9187314B2Anisotropic conductor and method of fabrication thereofBOSCH GMBH ROBERT·Filed 2014·Granted Nov 17, 2015·0 cites·20 claims
- 2348US10006810B2Method to modulate the sensitivity of a bolometer via negative interferenceBOSCH GMBH ROBERT·Filed 2015·Granted Jun 26, 2018·0 cites·15 claims
- 2447US10035696B2MEMS component including a diaphragm element which is attached via a spring structure to the component layer structureBOSCH GMBH ROBERT·Filed 2016·Granted Jul 31, 2018·0 cites·15 claims
- 2547US9903763B2Titanium nitride for MEMS bolometersBOSCH GMBH ROBERT·Filed 2014·Granted Feb 27, 2018·0 cites·7 claims
- 2647US9423303B2MEMS infrared sensor including a plasmonic lensBOSCH GMBH ROBERT·Filed 2013·Granted Aug 23, 2016·0 cites·16 claims
- 2743US9698281B2CMOS bolometerBOSCH GMBH ROBERT·Filed 2013·Granted Jul 4, 2017·0 cites·9 claims
- 2842US2021355977A1Anchoring DeviceBOSCH GMBH ROBERT·Filed 2019·Application pending·0 cites
- 2937US2017352795A1Sensor and/or transducer device and method for operating a sensor and/or transducer device having at least one bending structure, which includes at least one piezoelectric layerBOSCH GMBH ROBERT·Filed 2017·Application pending·0 cites
- 3036US8901923B2Magnetic field sensorKAUFMANN TIMO·Filed 2011·Granted Dec 2, 2014·0 cites·11 claims
- 3134US2017332176A1Micromechanical component and method for packaging a substrate having a micro-electromechanical microphone structure which includes at least one piezoelectric layerBOSCH GMBH ROBERT·Filed 2017·Application pending·0 cites
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