Inventor · disambiguated record
Takaya Okada
Also filed as: OKADA TAKAYA
5 granted patents·8 pending applications·17 citations·filing 2005–2017
78Inventor score
Top patents by PatentIndex Score
13 records- 0189US8854601B2Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2011·Granted Oct 7, 2014·8 cites·21 claims
- 0284US9360763B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2014·Granted Jun 7, 2016·4 cites·16 claims
- 0382US9310696B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2014·Granted Apr 12, 2016·3 cites·29 claims
- 0476US9429851B2Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2013·Granted Aug 30, 2016·2 cites·26 claims
- 0564US2018052398A1Projection optical system, exposure apparatus, and exposure methodNIKON CORP·Filed 2017·Application pending·0 cites
- 0663US9891539B2Projection optical system, exposure apparatus, and exposure methodNIPPON KOGAKU KK·Filed 2016·Granted Feb 13, 2018·0 cites·20 claims
- 0751US2012307220A1Maintenance Method, Exposure Method, Exposure Apparatus, and Method for Producing DeviceNAGASAKA HIROYUKI·Filed 2012·Application pending·0 cites
- 0847US2007285634A1Maintenance Method, Exposure Method, Exposure Apparatus, And Method For Producing DeviceNIKON CORP·Filed 2005·Application pending·0 cites
- 0947US2009046268A1Projection optical system, exposure apparatus, and exposure methodOMURA YASUHIRO·Filed 2006·Application pending·0 cites
- 1039US2008291555A1Optical element holding apparatus, barrel, exposure apparatus and device manufacturing methodOKADA TAKAYA·Filed 2008·Application pending·0 cites
- 1138US2008192222A1Exposure Apparatus, Exposure Method, and Device Manufacturing MethodNIKON CORP·Filed 2005·Application pending·0 cites
- 1235US2008106718A1Exposure Apparatus and Device Manufacturing MethodNIKON CORP·Filed 2005·Application pending·0 cites
- 1334US2010033700A1Optical element, optical element holding device, exposure apparatus, and device manufacturing methodOKADA TAKAYA·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →