Inventor · disambiguated record
Jens Zilian
Also filed as: ZILIAN JENS
2 granted patents·6 citations·filing 2010–2010
51Inventor score
Technology areasG01J
Files withZETTLER JOERG-THOMAS2
Top patents by PatentIndex Score
2 records- 0165US8496375B2Pyrometer adapted for detecting UV-radiation and use thereofZETTLER JOERG-THOMAS·Filed 2010·Granted Jul 30, 2013·3 cites·18 claims
- 0258US8388219B2Method for calibrating a pyrometer, method for determining the temperature of a semiconducting wafer and system for determining the temperature of a semiconducting waferZETTLER JOERG-THOMAS·Filed 2010·Granted Mar 5, 2013·3 cites·15 claims
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