Inventor · disambiguated record

Paul Alejon Fontejon, Jr.

Also filed as: FONTEJON JR PAUL ALEJON

1 granted patent·10 citations·filing 2006–2006

32Inventor score

Technology areasH01J

Files withHITACHI GLOBAL STORAGE TECH1

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1 record

0183US7799138B2In-situ method to reduce particle contamination in a vacuum plasma processing toolHITACHI GLOBAL STORAGE TECH·Filed 2006·Granted Sep 21, 2010·10 cites·12 claims

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