Inventor · disambiguated record
Jeffrey S. Hale
Also filed as: HALE JEFFREY S
34 granted patents·1 pending application·244 citations·filing 2001–2021
97Inventor score
Files withJ A WOOLLAM CO INC28J A WOOLLAM CO2LIPHARDT MARTIN M2HALE JEFFREY S1HASSLER CHRISTOPHER D1
Top patents by PatentIndex Score
35 records- 0190US7492455B1Discrete polarization state spectroscopic ellipsometer system and method of useJ A WOOLLAM CO INC·Filed 2006·Granted Feb 17, 2009·22 cites·6 claims
- 0289US10175160B1Method to analyze spectroscopic ellipsometry or intensity data of porous samples utilizing the anisotropic bruggeman-effective medium theoryJ A WOOLLAM CO INC·Filed 2018·Granted Jan 8, 2019·5 cites·14 claims
- 0388US10338362B1Beam focusing and reflecting optics with enhanced detector systemJ A WOOLLAM CO INC·Filed 2018·Granted Jul 2, 2019·3 cites·20 claims
- 0487US9976902B1Method to analyze spectroscopic ellipsometry data of porous samples utilizing the anisotropic Bruggeman-effective medium theoryJ A WOOLLAM CO INC·Filed 2017·Granted May 22, 2018·6 cites·24 claims
- 0587US8436994B2Fast sample height, AOI and POI alignment in mapping ellipsometer or the likeLIPHARDT MARTIN M·Filed 2011·Granted May 7, 2013·7 cites·7 claims
- 0686US7336361B1Spectroscopic ellipsometer and polarimeter systemsJ A WOOLLAM CO INC·Filed 2005·Granted Feb 26, 2008·15 cites·26 claims
- 0785US9500843B1Beam focusing and beam collecting opticsJ A WOOLLAM CO INC·Filed 2016·Granted Nov 22, 2016·4 cites·5 claims
- 0885US7872751B2Fast sample height, AOI and POI alignment in mapping ellipsometer or the likeJ A WOOLLAM CO INC·Filed 2008·Granted Jan 18, 2011·10 cites·29 claims
- 0983US7075650B1Discrete polarization state spectroscopic ellipsometer system and method of useJ A WOOLLAM CO INC·Filed 2003·Granted Jul 11, 2006·22 cites·28 claims
- 1082US7304737B1Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidenceJ A WOOLLAM CO INC·Filed 2006·Granted Dec 4, 2007·8 cites·17 claims
- 1182US7075649B1Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method of calibrationJ A WOOLLAM CO·Filed 2001·Granted Jul 11, 2006·19 cites·21 claims
- 1281US10989601B1Beam focusing and reflective opticsJ A WOOLLAM CO INC·Filed 2020·Granted Apr 27, 2021·1 cites·17 claims
- 1381US9442016B2Reflective focusing opticsJ A WOOLLAM CO INC·Filed 2014·Granted Sep 13, 2016·4 cites·18 claims
- 1481US7362435B1Method of determining initial thickness value for sample surface layer, and use of splines for fitting ellipsometric dataJ A WOOLLAM CO INC·Filed 2006·Granted Apr 22, 2008·7 cites·40 claims
- 1580US9921395B1Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam areaJ A WOOLLAM CO INC·Filed 2016·Granted Mar 20, 2018·3 cites·38 claims
- 1680US7705995B1Method of determining substrate etch depthJ A WOOLLAM CO INC·Filed 2005·Granted Apr 27, 2010·11 cites·12 claims
- 1779US7245376B2Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeterJ A WOOLLAM CO INC·Filed 2005·Granted Jul 17, 2007·9 cites·33 claims
- 1879US7215424B1Broadband ellipsometer or polarimeter system including at least one multiple element lensJ A WOOLLAM CO INC·Filed 2005·Granted May 8, 2007·6 cites·23 claims
- 1978US10018815B1Beam focusing and reflective opticsJ A WOOLLAM CO INC·Filed 2018·Granted Jul 10, 2018·1 cites·10 claims
- 2078US7623237B1Sample investigating systemJ A WOOLLAM CO INC·Filed 2006·Granted Nov 24, 2009·5 cites·11 claims
- 2176US7295313B1Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filtersJ A WOOLLAM CO INC·Filed 2004·Granted Nov 13, 2007·12 cites·17 claims
- 2275US7567345B1Ellipsometer meeting scheimpflug condition with provision of an essentially circular electromagnetic radiation spot on a sampleJ A WOOLLAM CO INC·Filed 2007·Granted Jul 28, 2009·8 cites·14 claims
- 2372US6636309B1Application of spectroscopic ellipsometry to in situ real time fabrication of multiple alternating high/low refractive index narrow bandpass optical filtersJ A WOOLLAM CO·Filed 2001·Granted Oct 21, 2003·16 cites·20 claims
- 2471US7193710B1Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element lensesJ A WOOLLAM CO INC·Filed 2004·Granted Mar 20, 2007·9 cites·5 claims
- 2571US6940595B1Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filtersJ A WOOLLAM CO INC·Filed 2002·Granted Sep 6, 2005·14 cites·28 claims
- 2670US6483586B1Beam splitting analyzer means in rotating compensator ellipsometerJ A WOOLLAM CO INC·Filed 2001·Granted Nov 19, 2002·8 cites·17 claims
- 2767US9347768B1In line ellipsometer system and method of usePFEIFFER GALEN L·Filed 2012·Granted May 24, 2016·2 cites·6 claims
- 2867US7535566B1Beam chromatic shifting and directing meansJ A WOOLLAM CO INC·Filed 2006·Granted May 19, 2009·4 cites·11 claims
- 2962US7099006B1Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing meansJ A WOOLLAM CO INC·Filed 2003·Granted Aug 29, 2006·3 cites·23 claims
- 3053US8159672B1Sample investigating system and method of useLIPHARDT MARTIN M·Filed 2009·Granted Apr 17, 2012·0 cites·13 claims
- 3150US2022244169A1Reflectometer, spectrophotometer, ellipsometer and polarimeter systems including a wavelength modifierJ A WOOLLAM CO INC·Filed 2021·Application pending·0 cites
- 3248US11675208B1Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector systemJ A WOOLLAM CO INC·Filed 2021·Granted Jun 13, 2023·0 cites·42 claims
- 3343US10061068B1Deviation angle self-compensating substantially achromatic retarderJ A WOOLLAM CO INC·Filed 2017·Granted Aug 28, 2018·0 cites·17 claims
- 3439US10775298B1Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearingHASSLER CHRISTOPHER D·Filed 2019·Granted Sep 15, 2020·0 cites·11 claims
- 3535US9952141B1Method of characterizing a beam of electromagnetic radiation in ellipsometer and the like systemsHALE JEFFREY S·Filed 2016·Granted Apr 24, 2018·0 cites·13 claims
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