Inventor · disambiguated record
Michinari Yamanaka
Also filed as: YAMANAKA MICHINARI
10 granted patents·2 pending applications·455 citations·filing 1992–2007
91Inventor score
Top patents by PatentIndex Score
12 records- 0195US5928528APlasma treatment method and plasma treatment systemMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Jul 27, 1999·190 cites·22 claims
- 0289US6008124ASemiconductor device having improved lamination-structure reliability for buried layers, silicide films and metal films, and a method for forming the sameMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Dec 28, 1999·90 cites·12 claims
- 0383US6898851B2Electronic device manufacturing methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted May 31, 2005·40 cites·20 claims
- 0474US5780908ASemiconductor apparatus with tungstein nitrideMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1996·Granted Jul 14, 1998·46 cites·8 claims
- 0568US5385867AMethod for forming a multi-layer metallic wiring structureMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1994·Granted Jan 31, 1995·40 cites·7 claims
- 0660US7852892B2Semiconductor laser device and method for manufacturing the samePANASONIC CORP·Filed 2006·Granted Dec 14, 2010·2 cites·5 claims
- 0759US5312776AMethod of preventing the corrosion of metallic wiringsMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1992·Granted May 17, 1994·28 cites·9 claims
- 0856US6859023B2Evaluation method for evaluating insulating film, evaluation device therefor and method for manufacturing evaluation deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted Feb 22, 2005·5 cites·16 claims
- 0953US7022619B2Method for fabricating electronic deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2003·Granted Apr 4, 2006·6 cites·12 claims
- 1050US2007128871A1Etching apparatus and etching methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2007·Application pending·0 cites
- 1142US2004241995A1Etching apparatus and etching methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Application pending·0 cites
- 1239US5837616ADry etching method for aluminum alloy and etching gas thereforMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Nov 17, 1998·8 cites·10 claims
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