Inventor · disambiguated record

Joseph W. Walters

Also filed as: WALTERS JOSEPH W

2 granted patents·15 citations·filing 1999–2001

56Inventor score

Technology areasH10P

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0163US6767427B2Apparatus and method for conditioning polishing pad in a chemical mechanical planarization processLAM RES CORP·Filed 2001·Granted Jul 27, 2004·13 cites·26 claims
0223US6265231B1Process control via valve position and rate of position change monitoringLAM RES CORP·Filed 1999·Granted Jul 24, 2001·2 cites·9 claims

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