Inventor · disambiguated record

Nelson Loke Chou San

Also filed as: SAN NELSON LOKE CHOU

2 granted patents·87 citations·filing 2002–2002

66Inventor score

Technology areasC23C H10P

Files withASM JAPAN2

Top patents by PatentIndex Score

2 records

0190US6767836B2Method of cleaning a CVD reaction chamber using an active oxygen speciesASM JAPAN·Filed 2002·Granted Jul 27, 2004·69 cites·1 claims
0276US6815332B2Method for forming integrated dielectric layersASM JAPAN·Filed 2002·Granted Nov 9, 2004·18 cites·34 claims

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