Inventor · disambiguated record
Haizheng Song
Also filed as: SONG HAIZHENG
5 granted patents·12 citations·filing 2012–2017
74Inventor score
Technology areasH10P
Files withUNIV SOUTH CAROLINA5
Top patents by PatentIndex Score
5 records- 0186US8900979B2Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial filmsUNIV SOUTH CAROLINA·Filed 2012·Granted Dec 2, 2014·6 cites·19 claims
- 0278US9644288B2Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial filmsUNIV SOUTH CAROLINA·Filed 2014·Granted May 9, 2017·4 cites·22 claims
- 0374US9644287B2Pretreatment method for reduction and/or elimination of basal plane dislocations close to epilayer/substrate interface in growth of SiC epitaxial filmsUNIV SOUTH CAROLINA·Filed 2014·Granted May 9, 2017·2 cites·22 claims
- 0457US10260166B2Method of growing high quality, thick SiC epitaxial films by eliminating silicon gas phase nucleation and suppressing parasitic depositionUNIV SOUTH CAROLINA·Filed 2017·Granted Apr 16, 2019·0 cites·20 claims
- 0553US9885124B2Method of growing high quality, thick SiC epitaxial films by eliminating silicon gas phase nucleation and suppressing parasitic depositionUNIV SOUTH CAROLINA·Filed 2012·Granted Feb 6, 2018·0 cites·23 claims
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