Inventor · disambiguated record
Alex Finkelman
Also filed as: FINKELMAN ALEX
3 granted patents·2 pending applications·23 citations·filing 1999–2022
60Inventor score
Top patents by PatentIndex Score
5 records- 0170US2023128366A1Liquid precursor injection for thin film depositionEUGENUS INC·Filed 2022·Application pending·0 cites
- 0268US11459654B2Liquid precursor injection for thin film depositionEUGENUS INC·Filed 2020·Granted Oct 4, 2022·0 cites·20 claims
- 0363US2023016016A1Systems and methods of placing substrates in semiconductor manufacturing equipmentEUGENUS INC·Filed 2022·Application pending·0 cites
- 0457US11328944B2Systems and methods of placing substrates in semiconductor manufacturing equipmentEUGENUS INC·Filed 2019·Granted May 10, 2022·0 cites·23 claims
- 0554US6306019B1Method and apparatus for conditioning a polishing padLAM RES CORP·Filed 1999·Granted Oct 23, 2001·23 cites·11 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →