Inventor · disambiguated record
Nishanth Manjunath
Also filed as: MANJUNATH NISHANTH
2 granted patents·5 citations·filing 2017–2020
51Inventor score
Technology areasH10P
Files withLAM RES CORP2
Top patents by PatentIndex Score
2 records- 0187US11286560B2Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matchingLAM RES CORP·Filed 2020·Granted Mar 29, 2022·2 cites·20 claims
- 0281US10697059B2Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matchingLAM RES CORP·Filed 2017·Granted Jun 30, 2020·3 cites·15 claims
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