Inventor · disambiguated record
Ayako Mizuno
Also filed as: MIZUNO AYAKO
6 granted patents·3 pending applications·37 citations·filing 1998–2016
76Inventor score
Top patents by PatentIndex Score
9 records- 0165US6284020B1Method of maintaining cleanliness of substrates and box for accommodating substratesTOSHIBA KK·Filed 1998·Granted Sep 4, 2001·32 cites·16 claims
- 0261US8771535B2Sample contamination methodYAMADA YUJI·Filed 2011·Granted Jul 8, 2014·2 cites·13 claims
- 0360US7850752B2Semiconductor manufacturing system and method of manufacturing semiconductor deviceTOSHIBA KK·Filed 2008·Granted Dec 14, 2010·1 cites·7 claims
- 0452US9658203B2Metal collection solution and method of analyzing substrate contaminationTOSHIBA KK·Filed 2015·Granted May 23, 2017·0 cites·10 claims
- 0545US10962519B2Analysis pretreatment deviceTOSHIBA MEMORY CORP·Filed 2016·Granted Mar 30, 2021·0 cites·13 claims
- 0644US7889313B2Immersion lithography apparatus and exposure methodTOSHIBA KK·Filed 2007·Granted Feb 15, 2011·2 cites·6 claims
- 0741US2007274814A1Local clean robot-transport plant and robot-transport manufacturing methodKAWASAKI ATSUKO·Filed 2007·Application pending·0 cites
- 0832US2011053058A1Semiconductor device fabrication mask and method of manufacturing the sameOTSUBO KYO·Filed 2010·Application pending·0 cites
- 0930US2011100393A1Method of cleaning mask and mask cleaning apparatusUEMURA ERI·Filed 2010·Application pending·0 cites
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