Inventor · disambiguated record
Florian Ahles
Also filed as: AHLES FLORIAN
3 granted patents·7 citations·filing 2015–2019
55Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH3
Top patents by PatentIndex Score
3 records- 0193US9939730B2Optical assemblyZEISS CARL SMT GMBH·Filed 2015·Granted Apr 10, 2018·7 cites·31 claims
- 0252US10761436B2Optical arrangement, in particular lithography system, with a transport lockZEISS CARL SMT GMBH·Filed 2019·Granted Sep 1, 2020·0 cites·20 claims
- 0344US10551747B2Device for changing a surface shape of an optical element via electron irradiationZEISS CARL SMT GMBH·Filed 2018·Granted Feb 4, 2020·0 cites·20 claims
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