Inventor · disambiguated record
Russell T. Herrin
Also filed as: HERRIN RUSSELL T · HERRIN RUSSELL THOMAS
23 granted patents·2 pending applications·148 citations·filing 2007–2019
96Inventor score
Top patents by PatentIndex Score
25 records- 0198US9862598B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2015·Granted Jan 9, 2018·20 cites·11 claims
- 0298US9815690B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2016·Granted Nov 14, 2017·26 cites·13 claims
- 0397US10414646B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2017·Granted Sep 17, 2019·7 cites·14 claims
- 0497US10093537B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2017·Granted Oct 9, 2018·6 cites·18 claims
- 0597US9330856B2Methods of manufacture for micro-electro-mechanical system (MEMS)HERRIN RUSSELL T·Filed 2010·Granted May 3, 2016·29 cites·14 claims
- 0697US8956903B2Planar cavity MEMS and related structures, methods of manufacture and design structuresHERRIN RUSSELL T·Filed 2010·Granted Feb 17, 2015·37 cites·22 claims
- 0786US9406472B2Planar cavity MEMS and related structures, methods of manufacture and design structuresDANG DINH·Filed 2010·Granted Aug 2, 2016·2 cites·19 claims
- 0883US8405186B2Transistor structure with a sidewall-defined intrinsic base to extrinsic base link-up region and method of forming the structureCAMILLO-CASTILLO RENATA·Filed 2010·Granted Mar 26, 2013·7 cites·17 claims
- 0982US10906803B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2019·Granted Feb 2, 2021·0 cites·16 claims
- 1082US8039356B2Through silicon via lithographic alignment and registrationIBM·Filed 2010·Granted Oct 18, 2011·6 cites·10 claims
- 1179US11021364B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2018·Granted Jun 1, 2021·0 cites·20 claims
- 1275US9397174B2Self-aligned gate electrode diffusion barriersIBM·Filed 2014·Granted Jul 19, 2016·3 cites·5 claims
- 1374US9493343B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2015·Granted Nov 15, 2016·0 cites·20 claims
- 1471US8513084B2Transistor structure with a sidewall-defined intrinsic base to extrinsic base link-up region and method of forming the transistorHARAME DAVID L·Filed 2010·Granted Aug 20, 2013·2 cites·23 claims
- 1569US10173889B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2014·Granted Jan 8, 2019·0 cites·13 claims
- 1669US9890039B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2016·Granted Feb 13, 2018·0 cites·14 claims
- 1768US9764944B2Planar cavity MEMS and related structures, methods of manufacture and design structuresIBM·Filed 2015·Granted Sep 19, 2017·0 cites·12 claims
- 1868US8716096B2Self-aligned emitter-base in advanced BiCMOS technologyCHAN KEVIN K·Filed 2011·Granted May 6, 2014·2 cites·13 claims
- 1960US8796130B2Diffusion barrier for oppositely doped portions of gate conductorGAMBINO JEFFREY P·Filed 2012·Granted Aug 5, 2014·1 cites·18 claims
- 2054US8916952B2Self-aligned emitter-base in advanced BiCMOS technologyIBM·Filed 2014·Granted Dec 23, 2014·0 cites·15 claims
- 2152US8673726B2Transistor structure with a sidewall-defined intrinsic base to extrinsic base link-up region and method of forming the transistorIBM·Filed 2013·Granted Mar 18, 2014·0 cites·20 claims
- 2250US8932920B2Self-aligned gate electrode diffusion barriersIBM·Filed 2013·Granted Jan 13, 2015·0 cites·15 claims
- 2344US2008174015A1Removal of etching process residual in semiconductor fabricationHERRIN RUSSELL THOMAS·Filed 2007·Application pending·0 cites
- 2438US2011177435A1Photomasks having sub-lithographic features to prevent undesired wafer patterningIBM·Filed 2010·Application pending·0 cites
- 2537US8796058B2Semiconductor structureHERRIN RUSSELL T·Filed 2011·Granted Aug 5, 2014·0 cites·17 claims
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