Inventor
NAGAMI KOICHI
JP42 patents
⚠️ This page may combine multiple inventors who share the name “NAGAMI KOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
41 patentsUS9761419B2Sep 12, 2017
Method for controlling potential of susceptor of plasma processing apparatus
TOKYO ELECTRON LTD70 citations98
US10553407B2Feb 4, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD47 citations97
US9870898B2Jan 16, 2018
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD48 citations97
US9754768B2Sep 5, 2017
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD59 citations97
US9355822B2May 31, 2016
Plasma processing apparatus
TOKYO ELECTRON LTD67 citations96
US10707053B2Jul 7, 2020
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD40 citations94
US10176971B2Jan 8, 2019
Plasma processing apparatus
TOKYO ELECTRON LTD39 citations94
US9941098B2Apr 10, 2018
Plasma processing method
TOKYO ELECTRON LTD34 citations94
US10593519B2Mar 17, 2020
Plasma processing apparatus
TOKYO ELECTRON LTD45 citations93
US10109461B2Oct 23, 2018
Plasma processing method
TOKYO ELECTRON LTD41 citations93
US9734992B2Aug 15, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD43 citations93
US9663858B2May 30, 2017
Plasma processing apparatus
TOKYO ELECTRON LTD47 citations90
US10431433B2Oct 1, 2019
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD7 citations82
US12243723B2Mar 4, 2025
Plasma processing apparatus
TOKYO ELECTRON LTD2 citations73
US11387077B2Jul 12, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD3 citations73
US11170979B2Nov 9, 2021
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD4 citations73
US10763126B2Sep 1, 2020
Etching apparatus and etching method
TOKYO ELECTRON LTD2 citations73
US9736921B2Aug 15, 2017
Method for impedance matching of plasma processing apparatus
TOKYO ELECTRON LTD3 citations72
US11646181B2May 9, 2023
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations71
US11251048B2Feb 15, 2022
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD2 citations71
US12154793B2Nov 26, 2024
Etching apparatus and etching method
TOKYO ELECTRON LTD1 citations63
US12033832B2Jul 9, 2024
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations63
US12537172B2Jan 27, 2026
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US12437970B2Oct 7, 2025
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US12261027B2Mar 25, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations62
US12136535B2Nov 5, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations62
US11887817B2Jan 30, 2024
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD1 citations62
US11764034B2Sep 19, 2023
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations62
US10250217B2Apr 2, 2019
Method for impedance matching of plasma processing apparatus
TOKYO ELECTRON LTD2 citations62
US10615005B2Apr 7, 2020
Plasma generating method
TOKYO ELECTRON LTD1 citations61
US12033833B2Jul 9, 2024
Filter circuit and plasma processing apparatus
TOKYO ELECTRON LTD0 citations54
US12537168B2Jan 27, 2026
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US12400832B2Aug 26, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations52
US12255049B2Mar 18, 2025
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD0 citations52
US11764082B2Sep 19, 2023
Control method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US11776795B2Oct 3, 2023
Plasma processing apparatus and power supply control method
TOKYO ELECTRON LTD0 citations51
US10269539B2Apr 23, 2019
Plasma processing method
TOKYO ELECTRON LTD0 citations51
US9960016B2May 1, 2018
Plasma processing method
TOKYO ELECTRON LTD1 citations51
US11594398B2Feb 28, 2023
Apparatus and method for plasma processing
TOKYO ELECTRON LTD0 citations50
US9824864B2Nov 21, 2017
Plasma processing method
TOKYO ELECTRON LTD0 citations42
US9805917B2Oct 31, 2017
Plasma processing method
TOKYO ELECTRON LTD0 citations42