Inventor · disambiguated record
Shunichi Mikami
Also filed as: MIKAMI SHUNICHI
5 granted patents·5 citations·filing 2012–2016
65Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0174US10069443B2Dechuck control method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Sep 4, 2018·4 cites·18 claims
- 0258US9653321B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2014·Granted May 16, 2017·1 cites·11 claims
- 0340US9147556B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted Sep 29, 2015·0 cites·6 claims
- 0432US10290510B2Plasma etching method, pattern forming method and cleaning methodTOKYO ELECTRON LTD·Filed 2016·Granted May 14, 2019·0 cites·13 claims
- 0530US10283368B2Plasma etching method and plasma etching apparatusTOKYO ELECTRON LTD·Filed 2016·Granted May 7, 2019·0 cites·7 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →