Inventor · disambiguated record
Naoki Yoshii
Also filed as: YOSHII NAOKI
8 granted patents·5 pending applications·46 citations·filing 2005–2018
83Inventor score
Top patents by PatentIndex Score
13 records- 0188US7717061B2Gas switching mechanism for plasma processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted May 18, 2010·20 cites·9 claims
- 0285US7887670B2Gas introducing mechanism and processing apparatus for processing object to be processedTOKYO ELECTRON LTD·Filed 2007·Granted Feb 15, 2011·8 cites·8 claims
- 0383US8822263B2Epitaxial growth method of a zinc oxide based semiconductor layer, epitaxial crystal structure, epitaxial crystal growth apparatus, and semiconductor deviceKOUKITU AKINORI·Filed 2009·Granted Sep 2, 2014·9 cites·3 claims
- 0476US11225708B2Plasma spraying device and method for manufacturing battery electrodeTOKYO ELECTRON LTD·Filed 2017·Granted Jan 18, 2022·3 cites·5 claims
- 0568US8211500B2Copper film deposition methodKOJIMA YASUHIKO·Filed 2005·Granted Jul 3, 2012·3 cites·11 claims
- 0663US7699945B2Substrate treatment method and film forming method, film forming apparatus, and computer programTOKYO ELECTRON LTD·Filed 2007·Granted Apr 20, 2010·2 cites·7 claims
- 0761US7846839B2Film forming method, semiconductor device manufacturing method, semiconductor device, program and recording mediumTOKYO ELECTRON LTD·Filed 2005·Granted Dec 7, 2010·1 cites·18 claims
- 0843US2008070017A1Layered Thin Film Structure, Layered Thin Film Forming Method, Film Forming System and Storage MediumYOSHII NAOKI·Filed 2006·Application pending·0 cites
- 0942US2018251891A1Vaporizer, film forming apparatus, and temperature control methodTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1042US2006068104A1Thin-film formation in semiconductor device fabrication process and film deposition apparatusTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 1142US2007004186A1Film forming methodTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 1238US2009029047A1Film-forming apparatus and film-forming methodTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 1333US8721846B2Method of forming film, film forming apparatus and storage mediumYOSHII NAOKI·Filed 2005·Granted May 13, 2014·0 cites·16 claims
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