Inventor · disambiguated record
Hari Hegde
Also filed as: HEGDE HARI · HEGDE HARI S
5 granted patents·2 pending applications·116 citations·filing 1998–2009
82Inventor score
Top patents by PatentIndex Score
7 records- 0185US7183716B2Charged particle source and operation thereofVEECO INSTR INC·Filed 2004·Granted Feb 27, 2007·46 cites·8 claims
- 0282US6545580B2Electromagnetic field generator and method of operationVEECO INSTR INC·Filed 1998·Granted Apr 8, 2003·44 cites·28 claims
- 0380US8703001B1Grid assemblies for use in ion beam etching systems and methods of utilizing the grid assembliesHEGDE HARI·Filed 2008·Granted Apr 22, 2014·10 cites·18 claims
- 0466US6447839B1Method of depositing multilayer thin filmsVEECO INSTR INC·Filed 2000·Granted Sep 10, 2002·9 cites·9 claims
- 0546US2010096254A1Deposition systems and methodsHEGDE HARI·Filed 2009·Application pending·0 cites
- 0643US6139906AMethods of depositing multilayer thin filmsVEECO INSTR INC·Filed 1999·Granted Oct 31, 2000·7 cites·5 claims
- 0740US2017140953A1Systems and methods for ion beam etchingHEGDE HARI·Filed 2008·Application pending·0 cites
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