Inventor · disambiguated record
Shigeyoshi Kojima
Also filed as: KOJIMA SHIGEYOSHI
4 granted patents·38 citations·filing 2000–2015
71Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0182US6786974B2Insulating film forming method and insulating film forming apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Sep 7, 2004·28 cites·7 claims
- 0261US6936134B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2001·Granted Aug 30, 2005·9 cites·15 claims
- 0345US6573191B1Insulating film forming method and insulating film forming apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Jun 3, 2003·1 cites·6 claims
- 0431US9875915B2Method for removing metal contamination and apparatus for removing metal contaminationTOKYO ELECTRON LTD·Filed 2015·Granted Jan 23, 2018·0 cites·22 claims
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